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Monday, June 27 • 1:00pm - 4:00pm
Pre-Conference Symposium 3: Sensorizing With MEMS: the Latest in Products, Design and Manufacturing

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This half-day session provides a fast and deep look at the status of MEMS sensors – the most powerful and innovative sensors around. MEMS suppliers will take the stage to discuss the latest achievements in manufacturing these amazing devices, as well as new embedded capabilities. Attendees should expect to meet some of the innovators in the space and will leave with a better understanding of supply chains, design capabilities, and new MEMS approaches from some of the most well-known suppliers in the industry.

1:00pm-1:15pm  Moderator Welcome - SEMI MSIG Overview
Moderator: Paul Carey, Director MSIG, SEMI

1:30pm-1:50pm Foundry Capability
Speaker: Robert MacDonald, Senior Staff Engineer, GE Research

1:50pm-2:10pm MEMS Design
Speaker: Mary Ann Maher, Ph.D., CEO, SoftMEMS

2:10pm-2:30pm MEMS Product Development
Speaker: Carolyn D. White, Ph.D., COO, Director of MEMS Development, A. M. Fitzgerald & Associates

2:30pm-2:40pm Break

2:40pm-3:00PM  High-Performance and Low-Power Motion Sensors for Monitoring and Navigation Applications
Speaker: Sam Zhang, Fellow and Director of MEMS System, Module and Application Engineering, Analog Devices Inc.

3:00pm-3:20pm MEMS Product: Environmental Sensors
Speaker: Thomas Block, Senior Product Manager for Magnetic and Environmental Sensors, Bosch Sensortec

3:20pm-3:40pm MEMS Stealth Wafer Dicing
Speaker: Richard Boardman, Senior Sales Engineer, GDSI

3:40pm-4:00pm Advanced MEMS Packaging
Speaker: Milena Vujosevic, VP, MEMS Advanced Packaging, TDK Invensense

Speakers
avatar for Paul Carey

Paul Carey

Director, MEMS and Sensors Industry Group, SEMI
Mr. Carey joined SEMI as the Director of SEMI’s MEMS and Sensors Group early in April 2021 after working at X-Ray imaging backplane supplier, dpiX, in various positions starting in 2003.  He was the process, equipment, and yield manager in their Gen 2.5 Palo Alto glass Fab until... Read More →
avatar for Robert MacDonald

Robert MacDonald

Senior Staff Engineer, GE Research
MA

Mary Ann Maher, Ph. D.

CEO, SoftMEMS
Dr. Mary Ann Maher received her Ph.D. from Caltech in 1989 in the area of semiconductor device modeling. At Tanner Research she began the simulation and modeling group and launched Tanner’s T-Spice analog circuit simulator product. As Director of Advanced Products, she brought to... Read More →
avatar for Carolyn White, Ph.D.

Carolyn White, Ph.D.

COO, Director of MEMS Development, A. M. Fitzgerald & Associates
Dr. White specializes in the design and fabrication of MEMS devices and has experience in foundry transfers and technology strategic analysis including of the evaluation of patent portfolios, feasibility studies, and cost/performance analysis. With over 20 years of experience in MEMS... Read More →
avatar for Sam Zhang

Sam Zhang

ADI Fellow, Analog Devices
Sam Zhang is an Analog Devices Fellow and Director of MEMS System, Module and Application Engineering. He has been a principal designer and innovator of ADI's high-performance inertial MEMS products, including the company’s first three-axis accelerometer and first MEMS microphone... Read More →
avatar for Thomas Block, Ph.D.

Thomas Block, Ph.D.

Senior Product Manager for Magnetic and Environmental Sensors, Bosch Sensortec
Thomas Block has over 15 years of experience workingin Product Management. He received his PhD in SolidState Chemistry from University of Mainz, Germany andDiploma in Chemistry from Duisburg University,Germany. After his PhD he worked as PostdoctoralFellow at the IBM Research Center... Read More →
RB

Richard Boardman

Senior Sales Engineer, GDSI
MV

Milena Vujosevic

VP, MEMS Advanced Packaging, TDK Invensense


Monday June 27, 2022 1:00pm - 4:00pm PDT